SPC SpetzElektronSistemy CJSC

R-Technologies, as part of this project, acted as a General Designer. All documentation chapters were developed, including architectural and structural, engineering and process systems, power supply, life safety systems, and control system. 

The customer rented two cleanroom modules for the manufacturing sites localization in the microelectronics cluster in the Technopolis Moscow.

 

The modules are built cleanrooms with a free layout and a minimum required set of engineering systems. The project goal was to update these modules to the level necessary for the technological processes uninterrupted run.

The project was carried out in a BIM design environment, the information model was created for the facilities. The systems were coordinated in the Navisworks environment.

 

We created a new layout of clean zones, developed zoning with various clean room classes and correct pressure cascades, and temperature zones were isolated. Clean zones are interconnected via air lock.

 

Since the existing air conditioning systems did not meet the requirements for ensuring the parameters of the make-up air supplied to the clean rooms, the central make-up air units were modernized.

To keep the proper temperature gradient in production areas, the Sensible cooling system was developed. For each temperature zonewe designed the separate branches with the possibility of individual regulation. The Process cooling water system was designed for cooling of the tools.

 

To provide process equipment with process medias, a demineralized water treatment station, a distilled water treatment station, a compressed dry air supply system, a process vacuum system and a special technological gases supply system were provided.

 

In addition to the clean rooms, the project also provides the administrative office section, where the Customer services and personnel located.